SEM Facility
FIELD EMISSION SCANNING ELECTRON MICROSCOPE
(Model: Sigma 360, Carl Zeiss, Germany)
Introduction
Vel Tech has enhanced its Central Instrumentation Facility with the addition of Carl Zeiss FESEM Sigma360 (Schottky FEG) with an Oxford EDS detector (Xplore 30). This advanced facility is now accessible for academic, R&D, and industrial users, offering high-quality analytical support at minimal cost.
Technical Specifications
- Resolution: 0.9nm @ 15kV, 1.3nm @ 1kV, 1.9nm @ 500V (max. probe current 20nA)
- Magnifications: 10x – 1,000,000x (Referenced to Poland 5” x 4.5” image format)
- Acceleration voltage: 0.02kV – 30kV
- Electron Source: Schottky field emitter
- Gun mode: Imaging & Analytical (± 8kV – with beam booster technology)
- Detectors: Inlens, Secondary Electron (SE2), Backscattered (BSD)
- EDS: Xplore30 (Oxford Instruments, UK) with sensor size of 30 mm² at count rates up to >1,000,000 cps
Applications
- Coating characterization
- Fracture and structural defect evaluation
- Differentiation of metal compositions through advanced analytical techniques
- Corrosion assessment and evaluation
- High-resolution analysis of ultra-fine specimen features
- Surface morphology examination
- Integrated circuit and semiconductor inspection
- Microstructural analysis
Charges
| S. No | Facility | Charges | Internal (₹) | External (Academics) (₹) | External (R&D Labs and Industries) (₹) |
|---|---|---|---|---|---|
| 1 | FESEM (Only Images) | per sample | 550 | 700 | 1250 |
| 2 | FESEM (Only Images) | per Hour (Max 3 samples) | 1500 | 2000 | 3500 |
| 3 | FESEM + EDS (Spectra or Line) | per sample | 650 | 1000 | 1800 |
| 4 | FESEM + EDS (Mapping) | per sample | 750 | 1100 | 2000 |
| 5 | FESEM + EDS (Spectra or Line and Mapping) | per sample | 900 | 1400 | 2600 |
| 6 | EDS (Spectra or Line) | per sample | 200 | 350 | 700 |
| 7 | EDS (Mapping) | per sample | 300 | 500 | 900 |
| 8 | Sputter coating | per sample | 100 | 250 | 400 |
In addition to the above charges, 18% GST will be extra. For external candidates, the Organization ID Card is must for getting Tax Invoice.
Contact Details
In-charge, FESEM Lab
Central Instrumentation Facility, Research Park,
Vel Tech Rangarajan Dr Sagunthala R&D Institute of Science and Technology,
Avadi, Chennai – 600062, India
Mobile (Whatsapp): +91 96770 65556
Slot Booking Instructions
- A maximum of 6 images will be taken for each sample.
- For hour basis testing: 1-3 samples will be considered for 1 Hour, 4-6 samples (2 Hours), and 7-9 samples (3 Hours) (Only for SEM images).
- The specimen dimensions should be less than 10 mm in each direction.
- Test samples should be 100% moisture free.
- All non-conductive samples require conductive coating (Au-Pd sputter coating available).
- Sample preparation facility available for metal samples (additional Rs.300/sample).